@Article{OliveiraVieiSilv:2019:EnAcGa,
author = "Oliveira, Rog{\'e}rio de Moraes and Vieira, Maxton S. and Silva,
Matheus M. N. F.",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Federal da Bahia (IFBA)} and {Instituto Nacional de Pesquisas
Espaciais (INPE)}",
title = "Enhancement of acetylene gas sensing properties for a ZnO-based
gas sensorproduced by plasma immersion ion implantation and
deposition",
journal = "Materials Science in Semiconductor Processing",
year = "2019",
volume = "93",
pages = "339--344",
month = "Apr.",
keywords = "ZnO-based gas sensor, Plasma immersion ion implantation, Fast time
response, High sensitivity, Low working temperature.",
abstract = "Zinc oxide (ZnO) based gas sensors with sensitivities reaching 90%
and time responses as low as two seconds foracetylene sensing (1
vol%), were produced by means of plasma immersion ion implantation
and deposition (PIII\&D). In the process, after the generation of
an argon glow discharge, metallic zinc is vaporized, partially
ionizedand implanted/deposited into/onto silicon substrates
without the aid of catalysts or buffer layers. Calcination
isperformed after treatment in atmospheric pressure at 500 °C, for
10 h, leading to the achievement of poly-crystalline ZnO
nanostructures. The resistance change of the sensor was monitored
by varying the respectiveworking temperature from 140 °C up to 280
°C for three different acetylene concentrations (1, 2, 3 vol%).
Besidesthe high sensitivity and the fast response time, the
recovery time was also measured and the repeatability of thesensor
was tested by feeding and cutting the working gas supply into the
measuring system at regular timeintervals.",
doi = "10.1016/j.mssp.2018.12.031",
url = "http://dx.doi.org/10.1016/j.mssp.2018.12.031",
issn = "1369-8001",
language = "en",
targetfile = "Oliveira_enhancement.pdf",
urlaccessdate = "27 abr. 2024"
}